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Queensland Microtechnology Facility
- Microtechnology Facility and Equipment
- Purpose-built building including class 100 and class 1000 cleanrooms
- Microtechnology facility infrastructure (Gas panels, vacuum pumps, gas abatement systems)
- Unique SiC processing equipment
- Advanced plasma etch and Sputter Depositions Tools
Solid State Physics Laboratory and National Hydrogen Materials Reference Facility
- Vibrating-sample magnetometer (4-673 K, 0-8.5 T)
- Numerous Sieverts apparatus for H absorption to 4000 bar
- Microbalance for hydrogen absorption (0-150 bar, 80-800 K)
- Thermal desorption spectroscopy equipment
- X-ray powder diffractometer with parallel-beam optics for thin films
- Ball planetary mills
- 2 Argon gloveboxes
- Furnaces
Raman Spectroscopy Laboratory
- Raman spectroscopy equipment
Synthetic Laboratory
- Attenuated-total-reflection add-on for infra-red spectrophotometer
AFM Laboratory
- Joel AFM