Queensland Microtechnology Facility
The Queensland Microtechnology Facility is a strategic research unit of Griffith University, with support from the Queensland State Government through the Smart State Research Facilities Funding Initiative. The QMF is distinguished by the following features:
- Equipment that provides a unique integration of research flexibility and processing at semiconductor-industry standards, which is aimed at bridging the gap between University research and Industry.
- A unique processing focus on developing SiC films on Si wafers that is aimed at integrating the benefits of the standard Si technology with the superior electrical, thermal, optical, and mechanical properties of crystalline SiC.
- The unique equipment for epitaxial growth of SiC films on Si wafers and the standard semiconductor processes are used as a platform technology for research and development of a broad range of superior semiconductor devices, including a nonvolatile memory cell, power switches, solar cells, devices for micro-electro-mechanical systems, and optoelectronic devices.
- A new approach, named “intelligent memory networks”, extends the memory-device research to the system level with the aim of addressing the problem imposed by the real-world variability upon electronic systems used for cognitive tasks.
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