The Queensland Microtechnology Facility is part of the Queensland Micro- and Nanotechnology Centre at Griffith University. It has been supported by the Queensland State Government through the Smart State Research Facilities Funding Initiative and the ANFF. The QMF is distinguished by the following features:
- Equipment that provides a unique integration of research flexibility and processing at semiconductor-industry standards, which is aimed at bridging the gap between University research and Industry.
- A unique processing focus on developing SiC films on Si wafers that is aimed at integrating the benefits of the standard Si technology with the superior electrical, thermal, optical, and mechanical properties of crystalline SiC.
- The unique equipment for epitaxial growth of SiC films on Si wafers and the standard semiconductor processes are used as a platform technology for research and development of a broad range of superior semiconductor devices, including a nonvolatile memory cell, power switches, solar cells, devices for micro-electro-mechanical systems, and optoelectronic devices.
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